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Nanoscale calibration standards and methods:

Nanoscale calibration standards and methods: dimensional and related measurements in the micro- and nanometer range - Weinheim: Wiley VCH; 2005 - xxii, 519 p. 24 cm.

Includes references and index.

ISBN: 352740502X(hb) 9783527405022

Dewey Class. No.: 620.50287 WIL-KOE

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