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Nanometer CMOS

Schwierz, Frank

Nanometer CMOS - Singapore: PAN Stanford publishing, 2010. - ix, 340p.; 24 x 16 cm.

Include appendix references index

ISBN: 9789814241083 (hb)

Subjects--Topical Terms:
MOSFETS
Plasma Etching
Lithography

Dewey Class. No.: 621.39732 SCH/Nan

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