TY  - GEN
AU  - Wilkening, Gunter
AU  - Koenders, Ludger
TI  - Nanoscale calibration standards and methods: dimensional and related measurements in the micro- and nanometer range
SN  - 352740502X(hb)
U1  - 620.50287 WIL-KOE 
PY  - 2005///
CY  - Weinheim
PB  - Wiley VCH; 
N1  - Includes references and index
ER  -