| 000 | 00503 a2200181 4500 | ||
|---|---|---|---|
| 020 | _a9789814241083 (hb) | ||
| 082 | _a621.39732 SCH/Nan | ||
| 100 | _aSchwierz, Frank | ||
| 245 | _aNanometer CMOS | ||
| 260 |
_aSingapore: _bPAN Stanford publishing, _c2010. |
||
| 300 |
_aix, 340p.; _c24 x 16 cm. |
||
| 500 | _aInclude appendix references index | ||
| 650 | _aMOSFETS | ||
| 650 | _aPlasma Etching | ||
| 650 | _aLithography | ||
| 700 |
_aWong, Hei _eAuthor |
||
| 700 |
_aLiou, Juin J _eAuthor |
||
| 999 |
_c137095 _d137095 |
||