000 00400nam#a2200145ua#4500
001 GOACATREC23560
900 0 0 _a19990901
901 0 0 _aENG
903 0 0 _a20954
245 0 0 _aThe Film Microelectronics : The Preparation and Properties of Components and Circuit Arrays
100 0 0 _aHolland, L.
440 0 0 _aHigh Vacuum Series
902 0 0 _a537.5353
260 0 0 _aLondon
_bChapman and Hall Limited
_c1965
999 _c23586
_d23586