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Nanoscale calibration standards and methods: dimensional and related measurements in the micro- and nanometer range

Contributor(s): Publication details: Weinheim: Wiley VCH; 2005Description: xxii, 519 p. 24 cmISBN:
  • 352740502X(hb)
  • 9783527405022
DDC classification:
  • 620.50287 WIL-KOE
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